Chiyambi cha Kapangidwe ndi Magwiridwe a NtchitoWoonda Film Lithium Niobate Electro optic Modulator
An modulator yamagetsikutengera kapangidwe kosiyana, kutalika kwa mafunde, ndi nsanja za filimu yopyapyala ya lithiamu niobate, komanso kuyerekeza kwathunthu magwiridwe antchito amitundu yosiyanasiyana yaMa modulators a EOM, komanso kusanthula kafukufuku ndi kagwiritsidwe ntchito kama modulators a lithiamu niobate opyapyalam'magawo ena.
1. Modulator ya lithiamu niobate yosasunthika
Mtundu uwu wa modulator umachokera ku mphamvu yabwino kwambiri ya electro-optic ya lithiamu niobate crystal ndipo ndi chipangizo chofunikira kwambiri cholumikizirana ndi kuwala mwachangu komanso patali. Pali zinthu zitatu zazikulu:
1.1Traveling wave electrode MZI modulator: Iyi ndi kapangidwe kabwino kwambiri. Gulu lofufuza la Lon č ar ku Harvard University linapeza mtundu wapamwamba kwambiri mu 2018, ndipo pambuyo pake linasintha zinthu kuphatikizapo capacitive loading kutengera ma substrates a quartz (bandwidth yayikulu koma yosagwirizana ndi silicon-based) ndi silicon-based yogwirizana kutengera substrate hollowing, kukwaniritsa bandwidth yayikulu (>67 GHz) ndi chizindikiro cha liwiro lalikulu (monga 112 Gbit/s PAM4).
1.2Folding MZI modulator: Pofuna kufupikitsa kukula kwa chipangizocho ndikuchisintha kuti chigwirizane ndi ma module ang'onoang'ono monga QSFP-DD, chithandizo cha polarization, cross waveguide kapena inverted microstructure electrodes amagwiritsidwa ntchito kuchepetsa kutalika kwa chipangizocho ndi theka ndikukwaniritsa bandwidth ya 60 GHz.
1.3Single/Dual Polarization Coherent Orthogonal (IQ) Modulator: Imagwiritsa ntchito mawonekedwe apamwamba kwambiri kuti iwonjezere kuchuluka kwa kutumiza. Gulu lofufuza la Cai ku Sun Yat sen University lidapeza modulator yoyamba ya on-chip single polarization IQ mu 2020. Modulator ya dual polarization IQ yomwe idapangidwa mtsogolo imagwira ntchito bwino, ndipo mtundu womwe umachokera ku quartz substrate wakhazikitsa mbiri imodzi ya transmission rate ya wavelength ya 1.96 Tbit/s.
2. Resonant cavity type thin-film lithium niobate modulator
Kuti tikwaniritse ma modulators ang'onoang'ono komanso akuluakulu a bandwidth, pali mitundu yosiyanasiyana ya resonant cavity yomwe ilipo:
2.1 Kachipangizo ka kristalo (PC) ndi ka micro ring modulator: Gulu lofufuza la Lin ku University of Rochester lapanga kachipangizo koyamba ka kristalo ka photonic kogwira ntchito kwambiri. Kuphatikiza apo, ma micro ring modulator otengera silicon lithium niobate heterogeneous integration ndi homogeneous integration nawonso aperekedwa, zomwe zapangitsa kuti ma bandwidth a GHz angapo afike.
2.2Bragg grating resonant cavity modulator: kuphatikiza Fabry Perot (FP) cavity, Bragg grating (WBG) waveguide, ndi slow light (SL) modulator. Mapangidwe awa adapangidwa kuti agwirizane kukula, kulolerana kwa njira, ndi magwiridwe antchito, mwachitsanzo, 2 × 2 FP resonant cavity modulator imapeza bandwidth yayikulu kwambiri yopitilira 110 GHz. Modulator yopepuka pang'onopang'ono yochokera ku Bragg grating yolumikizidwa imakulitsa bandwidth yogwira ntchito.
3. Modulator yopyapyala yophatikizika ya lithiamu niobate
Pali njira zitatu zazikulu zophatikizira ukadaulo wa CMOS pamapulatifomu okhala ndi silicon ndi magwiridwe antchito abwino kwambiri a lithiamu niobate:
3.1 Kuphatikizika kwa mitundu yosiyanasiyana ya ma bond: Mwa kulumikizana mwachindunji ndi benzocyclobutene (BCB) kapena silicon dioxide, lithiamu niobate yopyapyala imasamutsidwira ku nsanja ya silicon kapena silicon nitride, zomwe zimapangitsa kuti pakhale mulingo wa wafer, kuphatikiza kokhazikika kutentha kwambiri. Modulator imawonetsa bandwidth yayikulu (>70 GHz, ngakhale kupitirira 110 GHz) komanso kuthekera kotumiza chizindikiro mwachangu.
3.2 Kuyika zinthu zoyendetsera mafunde osiyanasiyana: kuyika silicon kapena silicon nitride pa filimu yopyapyala ya lithiamu niobate ngati chiwongolero cha mafunde kumathandiziranso kusintha kwa ma electro-optic bwino.
3.3 Kuphatikizika kosiyanasiyana kwa kusindikiza kwa microtransfer (μ TP): Uwu ndi ukadaulo womwe ukuyembekezeka kugwiritsidwa ntchito popanga zinthu zazikulu, womwe umasamutsa zida zogwirira ntchito zomwe zakonzedwa kale kuti zigwire ma chips kudzera muzipangizo zolondola kwambiri, kupewa kukonzedwa kovuta pambuyo pake. Wagwiritsidwa ntchito bwino pa silicon nitride ndi nsanja zochokera ku silicon, zomwe zimapangitsa kuti ma bandwidth a GHz akhale makumi ambiri.
Mwachidule, nkhaniyi ikufotokoza mwatsatanetsatane njira yaukadaulo ya ma modulators a electro-optic kutengera nsanja zopyapyala za lithium niobate, kuyambira kutsata mapangidwe apamwamba komanso akuluakulu a bandwidth osasinthika, kufufuza mapangidwe ang'onoang'ono a resonant cavity, ndikuphatikizana ndi nsanja zokhwima za photonic zochokera ku silicon. Ikuwonetsa kuthekera kwakukulu komanso kupita patsogolo kosalekeza kwa ma modulators a lithium niobate a thin film pakudutsa malire a magwiridwe antchito a ma modulators achikhalidwe ndikukwaniritsa kulumikizana kwachangu kwa kuwala.
Nthawi yotumizira: Mar-31-2026




