Kapangidwe kachithunzidera lophatikizidwa
Ma circuits ophatikizidwa a Photonic(PIC) nthawi zambiri amapangidwa pogwiritsa ntchito ma script a masamu chifukwa cha kufunika kwa kutalika kwa njira mu ma interferometer kapena mapulogalamu ena omwe amakhudzidwa ndi kutalika kwa njira.ChithunziAmapangidwa pojambula zigawo zingapo (nthawi zambiri 10 mpaka 30) pa wafer, yomwe imapangidwa ndi mawonekedwe ambiri a polygonal, nthawi zambiri imaimiridwa mu mtundu wa GDSII. Musanatumize fayiloyo kwa wopanga photomask, ndikofunikira kwambiri kuti muzitha kutsanzira PIC kuti mutsimikizire kulondola kwa kapangidwe kake. Kutsanziraku kumagawidwa m'magawo angapo: mulingo wotsika kwambiri ndi kutsanzira kwa electromagnetic (EM) kwa magawo atatu, komwe kutsanziraku kumachitika pamlingo wa sub-wavelength, ngakhale kuyanjana pakati pa maatomu muzinthuzo kumayendetsedwa pamlingo wa macroscopic. Njira zodziwika bwino zimaphatikizapo finite-difference Time-domain ya magawo atatu (3D FDTD) ndi eigenmode expansion (EME). Njirazi ndizolondola kwambiri, koma sizothandiza nthawi yonse yotsanzira PIC. Mulingo wotsatira ndi kutsanzira kwa EM kwa magawo awiri ndi asanu, monga kutsanzira kwa finite-difference beam propagation (FD-BPM). Njirazi ndi zachangu kwambiri, koma zimataya kulondola kwina ndipo zimatha kuthana ndi kutsanzira kwa paraxial ndipo sizingagwiritsidwe ntchito kutsanzira ma resonators, mwachitsanzo. Gawo lotsatira ndi 2D EM simulation, monga 2D FDTD ndi 2D BPM. Izi nazonso ndi zachangu, koma zili ndi magwiridwe antchito ochepa, chifukwa sizingathe kutsanzira ma polarization rotators. Gawo lina ndi transmission ndi/kapena scattering matrix simulation. Gawo lililonse lalikulu limachepetsedwa kukhala gawo lokhala ndi input ndi output, ndipo waveguide yolumikizidwa imachepetsedwa kukhala gawo losintha ndi attenuation. Ma simulation awa ndi othamanga kwambiri. Chizindikiro chotulutsa chimapezeka pochulukitsa matrix yotumizira ndi chizindikiro cholowetsa. Matrix yofalikira (yomwe zinthu zake zimatchedwa S-parameters) imachulukitsa zizindikiro zolowera ndi zotuluka mbali imodzi kuti ipeze zizindikiro zolowera ndi zotuluka mbali ina ya gawolo. Kwenikweni, matrix yofalikira imakhala ndi reflection mkati mwa chinthucho. Matrix yofalikira nthawi zambiri imakhala yayikulu kawiri kuposa matrix yotumizira mu gawo lililonse. Mwachidule, kuyambira 3D EM mpaka ku transmission/scattering matrix simulation, gawo lililonse la simulation limapereka kusinthana pakati pa liwiro ndi kulondola, ndipo opanga amasankha mulingo woyenera wa simulation pazosowa zawo kuti akonze njira yotsimikizira kapangidwe.
Komabe, kudalira kuyerekezera kwa maginito amagetsi a zinthu zina ndikugwiritsa ntchito matrix yofalikira/yosamutsa kuti muyerekezere PIC yonse sikutsimikizira kapangidwe kolondola kwathunthu patsogolo pa mbale yoyendera. Mwachitsanzo, kutalika kwa njira kosawerengeka bwino, ma waveguide a multimode omwe amalephera kuletsa bwino ma mode apamwamba, kapena ma waveguide awiri omwe ali pafupi kwambiri omwe amabweretsa mavuto osayembekezereka olumikizana mwina sangadziwike panthawi yoyeserera. Chifukwa chake, ngakhale zida zapamwamba zoyeserera zimapereka mphamvu zotsimikizira kapangidwe, zimafunikirabe kusamala kwambiri ndi kuyang'aniridwa mosamala ndi wopanga, kuphatikiza ndi chidziwitso chogwira ntchito komanso chidziwitso chaukadaulo, kuti atsimikizire kulondola ndi kudalirika kwa kapangidwe ndikuchepetsa chiopsezo cha flow sheet.
Njira yotchedwa sparse FDTD imalola kuti ma simulation a 3D ndi 2D FDTD achitidwe mwachindunji pa kapangidwe kathunthu ka PIC kuti atsimikizire kapangidwe kake. Ngakhale kuti n'zovuta kuti chida chilichonse choyezera ma electromagnetic chiyese PIC yayikulu kwambiri, sparse FDTD imatha kuyerekeza dera lalikulu lapafupi. Mu 3D FDTD yachikhalidwe, ma simulation amayamba poyambitsa zigawo zisanu ndi chimodzi za munda wa electromagnetic mkati mwa voliyumu inayake yoyezera. Pamene nthawi ikupita, gawo latsopano la munda mu voliyumu limawerengedwa, ndi zina zotero. Gawo lililonse limafuna kuwerengera kwambiri, kotero zimatenga nthawi yayitali. Mu sparse 3D FDTD, m'malo mowerengera pa sitepe iliyonse pa mfundo iliyonse ya voliyumu, mndandanda wa zigawo zamunda umasungidwa zomwe zingagwirizane ndi voliyumu yayikulu mosasinthika ndikuwerengedwa pazinthuzo zokha. Pa sitepe iliyonse ya nthawi, mfundo zomwe zili pafupi ndi zigawo zamunda zimawonjezedwa, pomwe zigawo zamunda zomwe zili pansi pa malire enaake a mphamvu zimatsitsidwa. Pazinthu zina, kuwerengera kumeneku kumatha kukhala ndi maoda angapo a kukula mwachangu kuposa 3D FDTD yachikhalidwe. Komabe, ma FDTDS ochepa sagwira ntchito bwino pochita zinthu zogawanika chifukwa nthawi ino gawo limafalikira kwambiri, zomwe zimapangitsa kuti mndandanda ukhale wautali kwambiri komanso wovuta kuusamalira. Chithunzi 1 chikuwonetsa chitsanzo cha chithunzi cha 3D FDTD simulation chofanana ndi polarization beam splitter (PBS).
Chithunzi 1: Zotsatira za kuyerekezera kuchokera ku 3D sparse FDTD. (A) ndi mawonekedwe apamwamba a kapangidwe kamene kakuyerekezeredwa, komwe ndi kolumikizira kolunjika. (B) Kuwonetsa chithunzi cha kuyerekezera pogwiritsa ntchito kusangalatsa kwa quasi-TE. Ma diagram awiri omwe ali pamwambapa akuwonetsa mawonekedwe apamwamba a zizindikiro za quasi-TE ndi quasi-TM, ndipo ma diagram awiri omwe ali pansipa akuwonetsa mawonekedwe ofanana. (C) Kuwonetsa chithunzi cha kuyerekezera pogwiritsa ntchito kusangalatsa kwa quasi-TM.
Nthawi yotumizira: Julayi-23-2024