Mapangidwe amatopeChigawo chophatikizira
Zithunzi zophatikizira.Chithunziimapangidwa chifukwa cha zigawo zingapo (nthawi zambiri 10 mpaka 30) pa wokwera, zomwe zimapangidwa ndi mawonekedwe ambiri a polybonal, nthawi zambiri imayimiriridwa mu mtundu wa GDSII. Musanatumize fayilo ku Photomask wopanga, ndikofunikira kwambiri kuti athe kusintha chithunzicho kuti chitsimikizire kulondola kwa kapangidwe kake. Kufanizira kumagawidwa m'magawo angapo: mulingo wotsika kwambiri ndi mawonekedwe a mawonekedwe atatu a mawonekedwe (em) omwe amayesedwa pamlingo wapamtunda, ngakhale kuti kuyanjana pakati pa macroscopic. Njira zomwe zimaphatikizapo nthawi yamitundu itatu yosiyanasiyana - domain (3d fdtd) ndi kukula kwa eigenmode (eme). Njirazi ndizolondola kwambiri, koma ndizosatheka chifukwa cha nthawi yonse yopindika. Gawo lotsatira ndi mafashoni a 2.5-mawonekedwe a EM, kufalikira kwapafupi-kosinthika kosintha (Fd-BPM). Njirazi ndizofulumira kwambiri, koma kudzipereka molondola komanso kungogwiritsa ntchito kapinga ndipo silingathe kugwiritsidwa ntchito poyerekeza okonzanso okonzanso, mwachitsanzo. Gawo lotsatira ndi mafashoni 2D em em, monga 2d Fdtd ndi 2d bpm. Izi zimachitikanso mwachangu, koma ndimagwira ntchito zochepa, monga momwe sangathe kusintha orator orator. Mulingo wina ndikutumiza ndi / kapena kubereka matrix matrix. Gawo lililonse lalikulu limachepetsedwa kukhala chinthu chophatikizika ndi zotulutsa ndi kutulutsa, ndipo mafunde olumikizidwa amachepetsedwa kwa gawo la magawo a gawo ndi chodyera. Izi ndizofulumira kwambiri. Chizindikiro chotulutsa chimapezeka ndikuchulukitsa matrix polowera. Kutulutsa matrix (zomwe zimatchedwa s-magawo) zimachulukitsa zowonjezera ndi zizindikiro mbali imodzi kuti mupeze zolowera mbali ina ya chigawo china. Kwenikweni, matrix osokoneza amakhala ndi chiwonetserochi mkati mwa chinthucho. Matrix osokoneza nthawi zambiri amakhala ochulukirapo monga matrix omwe ali muyeso uliwonse. Mwachidule.
Komabe, kudalirani pa electromagnomation ya zinthu zina ndikugwiritsa ntchito matrix kapena kusamutsa matrix kuti musinthe chithunzi chonsecho sichimatsimikizira kapangidwe kolondola pamaso pa mbale yoyenda. Mwachitsanzo, njira yochepetsetsa, mitundu yambiri ikulephera kusokoneza mozama mitundu yayikulu, kapena magawo awiri omwe ali oyandikana nawo omwe ali pafupi kwambiri kwa wina ndi mnzake omwe akupita ku mavuto omwe akuphatikizidwa ndi omwe akuyembekezeredwa poyerekeza. Chifukwa chake, ngakhale zida zapamwamba zimapereka kuthekera kwamphamvu kwamphamvu, zimangoyang'ana kwambiri ndi wopanga, kuphatikizapo chidziwitso cha kapangidwe kake ndikuchepetsa chiopsezo cha pepalalo.
Njira yotchedwa FDTD imalola 3d ndi 2d fdtd masitepe oyenera kuchitidwa mwachindunji pamapangidwe onse a chithunzi chotsimikizira kapangidwe kake. Ngakhale zimakhala zovuta kwa chida chilichonse chosinthira chizindikiro cha electromagnetic kwambiri, chotupa chambiri chimatha kusintha dera lalikulu la komweko. Mwachikhalidwe 3D FDTD, chofanizira chimayambira poyambitsa magawo asanu ndi limodzi a munda wamagetsi womwe uli ndi voliyumu yochuluka. Pakapita nthawi, gawo latsopanoli la voliyumu limawerengeredwa, ndi zina zotero. Gawo lirilonse limafuna kuwerengera zambiri, chifukwa chake zimatenga nthawi yayitali. Mumwaziropa 3D fdtd, m'malo mowerengera gawo lililonse pamalopo, mndandanda wazomwe zimasungidwa zimagwiritsidwanso ntchito mozama ndi kuchuluka kwakukulu ndikuwerengedwa kwa zinthuzo. Nthawi iliyonse chotsatira, malo oyandikana ndi minda amawonjezeredwa, pomwe zigawo zikuluzikulu m'munsi mwa mphamvu inayake zimaponyedwa. Kwa nyumba zina, matendawa amatha kukhala ovomerezeka angapo a ugser mwachangu kuposa mawonekedwe a 3D FDTD. Komabe, zongocheza pang'ono sizichita bwino pochita ndi zoyambitsa matenda chifukwa nthawi ino idafalikira kwambiri, ndikupanga mndandanda womwe ndi wautali komanso wovuta kwambiri. Chithunzi 1 chikuwonetsa chithunzi cha 3D fdtd chofanana ndi chodukiza polarization (Pbs).
Chithunzi 1: Kufanizira zotsatira za 3d fdtd. . . Ma digile awiriwa pamwambapa akuwonetsa mawonekedwe apamwamba a tersi-te ndi ma quasi-tm ndi ma digigs, ndipo zojambula ziwirizo pansipa zikuwonetsa mawonekedwe ogwirizana ndi gawo. (C) Amawonetsa zojambulajambula za kuwerengetsa pogwiritsa ntchito Quasi-TM.
Post Nthawi: Jul-23-2024