Wapamwamba Integrated woonda filimu lithiamu niobate electro-optic modulator

Mzere wapamwambaelectro-optic modulatorndi microwave photon ntchito
Pakuchulukirachulukira kwa njira zoyankhulirana, kuti apititse patsogolo luso la kutumiza ma siginecha, anthu amaphatikiza ma photon ndi ma elekitironi kuti akwaniritse zina, ndipo ma microwave photonics adzabadwa. Electro-optical modulator ndiyofunikira kuti magetsi azitha kuyatsamicrowave photonic systems, ndipo sitepe yofunikayi nthawi zambiri imatsimikizira momwe dongosolo lonse likuyendera. Popeza kutembenuka kwa ma radio frequency signal kukhala optical domain ndi njira ya analogi, komanso wambama electro-optical modulatorskukhala ndi chibadwa chosagwirizana, pali kusokonekera kwakukulu pakutembenuka. Kuti mukwaniritse pafupifupi kusinthasintha kwa mzere, malo ogwiritsira ntchito modulator nthawi zambiri amakhazikika pa orthogonal bias point, koma sangathe kukwaniritsa zofunikira za microwave photon link pa mzere wa modulator. Electro-optic modulators okhala ndi mzere wapamwamba amafunikira mwachangu.

Kusinthasintha kwapamwamba kwambiri kwazitsulo za silicon kumatheka chifukwa cha free carrier plasma dispersion (FCD). Zonse za FCD effect ndi PN junction modulation ndizopanda mzere, zomwe zimapangitsa kuti silicon modulator ikhale yochepa kusiyana ndi lithiamu niobate modulator. Zida za lithiamu niobate zimawoneka bwino kwambirielectro-optical modulationZotsatira zake za Pucker. Pa nthawi yomweyo, lifiyamu niobate zakuthupi ndi ubwino waukulu bandiwifi, makhalidwe abwino kusinthasintha, imfa otsika, kusakanikirana kosavuta ndi ngakhale ndi ndondomeko semiconductor, ntchito woonda filimu lithiamu niobate kupanga mkulu-ntchito electro-optical modulator, poyerekeza ndi silicon. pafupifupi palibe "mbale yaifupi", komanso kukwaniritsa linearity mkulu. Thin film lithium niobate (LNOI) electro-optic modulator pa insulator yakhala njira yodalirika yachitukuko. Ndi chitukuko cha woonda filimu lifiyamu niobate zakuthupi kukonzekera luso ndi waveguide etching luso, mkulu kutembenuka dzuwa ndi apamwamba kusakanikirana woonda filimu lifiyamu niobate elekitirodi-mawonekedwe modulator wakhala munda wa maphunziro mayiko ndi makampani.

Makhalidwe a filimu yopyapyala ya lithiamu niobate
Mu United States DAP AR kukonzekera wapanga kuwunika zotsatirazi wa lithiamu niobate zipangizo: ngati pakati pa kusintha kwamagetsi amatchulidwa ndi silicon zakuthupi zomwe zimapangitsa kuti zitheke, ndiye kuti malo obadwirako kusintha kwa photonics ayenera kutchedwa lithiamu niobate. . Ichi ndi chifukwa lithiamu niobate integrates electro-optical effect, acousto-optical effect, piezoelectric effect, thermoelectric effect ndi photorefractive effect mu imodzi, monga zida za silicon m'munda wa optics.

Pankhani ya mawonekedwe opatsirana owoneka bwino, zinthu za InP zimakhala ndi kutaya kwakukulu kwapa-chip chifukwa cha kuyamwa kwa kuwala mu bandi yomwe imagwiritsidwa ntchito kwambiri ya 1550nm. SiO2 ndi silicon nitride ali ndi makhalidwe abwino kwambiri opatsirana, ndipo kutayika kumatha kufika pamlingo wa ~ 0.01dB/cm; Pakali pano, kutayika kwa waveguide kwa mafilimu ochepa kwambiri a lithiamu niobate waveguide kumatha kufika pamlingo wa 0.03dB/cm, ndipo kutayika kwa filimu yopyapyala ya lithiamu niobate waveguide kumatha kuchepetsedwa ndikusintha kosalekeza kwaukadaulo muukadaulo. m'tsogolo. Chifukwa chake, filimu yopyapyala ya lithiamu niobate iwonetsa magwiridwe antchito azinthu zopepuka monga photosynthetic njira, shunt ndi microring.

Pankhani ya kupanga kuwala, InP yokha ndiyomwe imatha kutulutsa kuwala mwachindunji; Chifukwa chake, kuti mugwiritse ntchito ma microwave photon, ndikofunikira kuyambitsa gwero la kuwala kwa InP pa LNOI based Photonic Integrated Chip pobwezeretsanso kuwotcherera kapena kukula kwa epitaxial. Pankhani ya kusinthasintha kwa kuwala, zatsimikiziridwa pamwambapa kuti filimu yopyapyala ya lithiamu niobate ndizosavuta kukwaniritsa bandwidth yayikulu yosinthira, voteji yotsika ndi theka lamagetsi komanso kutaya kutsika kochepa kuposa InP ndi Si. Kuphatikiza apo, kusinthasintha kwapamwamba kwa electro-optical modulation ya filimu yopyapyala ya lithiamu niobate ndikofunikira pamapulogalamu onse a microwave photon.

Pankhani ya kuwala kolowera, kuthamanga kwamphamvu kwa electro-optical kuyankha kwa filimu yopyapyala ya lifiyamu niobate kumapangitsa LNOI yochokera kumayendedwe owoneka bwino omwe amatha kusinthira mothamanga kwambiri, komanso kugwiritsa ntchito mphamvu zakusintha kothamanga kotereku kumakhala kochepa kwambiri. Pakugwiritsa ntchito ukadaulo wophatikizika wa microwave photon, chipangizo cha beamforming choyendetsedwa bwino chimakhala ndi mphamvu yosinthira mwachangu kuti ikwaniritse zosowa zakusaka kwamtengo, ndipo mawonekedwe amagetsi otsika kwambiri amasinthidwa kuti agwirizane ndi zofunikira zazikulu. -Scale phased array system. Ngakhale InP yochokera ku Optical switch imatha kuzindikiranso kusintha kwanjira yothamanga kwambiri, imadzetsa phokoso lalikulu, makamaka pomwe chosinthira cha multilevel Optical chikutsitsidwa, phokoso la phokoso lidzawonongeka kwambiri. Silicon, SiO2 ndi zida za silicon nitride zimatha kusintha njira zowunikira kudzera pa thermo-optical effect kapena carrier dispersion effect, zomwe zimakhala ndi zovuta zogwiritsa ntchito mphamvu zambiri komanso kuthamanga kwapang'onopang'ono. Pamene kukula kwa magawo a magawo ndi kwakukulu, sikungathe kukwaniritsa zofunikira zogwiritsira ntchito mphamvu.

Pankhani ya optical amplification, ndisemiconductor kuwala amplifier (SOA) zochokera ku InP zakhala zokhwima kuti zigwiritsidwe ntchito pamalonda, koma zimakhala ndi zovuta za phokoso lapamwamba komanso mphamvu zochepa zotulutsa mphamvu, zomwe sizikugwirizana ndi kugwiritsa ntchito ma microwave photon. The parametric amplification process of thin-film lithium niobate waveguide based on periodic activation and inversion can achieve low low and high power on-chip optical amplification, amene angathe kukwaniritsa zofunikira za Integrated microwave photon technology for on-chip optical amplification.

Pankhani ya kuzindikira kuwala, filimu yopyapyala ya lithiamu niobate ili ndi mawonekedwe abwino opatsirana kuti iwunikire mu bandi ya 1550 nm. Ntchito ya kutembenuka kwa photoelectric sikungachitike, kotero kwa ma microwave photon ntchito, kuti akwaniritse zosowa za kutembenuka kwa photoelectric pa chip. Magawo ozindikira a InGaAs kapena a Ge-Si akuyenera kuyambitsidwa pa LNOI based Photonic Integrated chips ndikubwezanso kuwotcherera kapena kukula kwa epitaxial. Pankhani yolumikizana ndi fiber optical, chifukwa kuwala kwa fiber palokha ndi SiO2, gawo la SiO2 waveguide lili ndi digiri yofananira kwambiri ndi gawo la optical fiber, ndipo kulumikizana ndikosavuta kwambiri. The mode munda m'mimba mwake wa oletsedwa mwamphamvu waveguide woonda filimu lifiyamu niobate ndi za 1μm, amene ndi wosiyana kwambiri ndi mode munda wa CHIKWANGWANI kuwala, kotero yoyenera mode malo kusintha ayenera kuchitidwa kuti zifanane ndi munda mode wa CHIKWANGWANI kuwala.

Pankhani ya kuphatikiza, kaya zida zosiyanasiyana zimakhala ndi kuthekera kwakukulu kophatikizana zimadalira makamaka mapindikidwe opindika a waveguide (yokhudzidwa ndi kuchepa kwa gawo la waveguide mode). Mafunde oletsedwa mwamphamvu amalola utali wopindika wocheperako, womwe umakhala wothandiza kwambiri pakuzindikira kuphatikiza kwakukulu. Chifukwa chake, mafilimu owonda kwambiri a lithiamu niobate waveguides amatha kukwaniritsa kuphatikiza kwakukulu. Choncho, maonekedwe a filimu woonda lifiyamu niobate kumapangitsa kuti lithiamu niobate zakuthupi kwenikweni kuchita mbali ya kuwala "silicon". Pogwiritsa ntchito ma microwave photon, ubwino wa filimu yopyapyala ya lithiamu niobate ndi yowonekera kwambiri.