Filimu yopyapyala ya lithiamu niobate komanso filimu yopyapyala ya lithiamu niobate modulator

Ubwino ndi kufunikira kwa filimu yopyapyala ya lithiamu niobate muukadaulo wophatikizika wa microwave photon

Microwave Photon Technologyali ndi ubwino waukulu ntchito bandiwifi, amphamvu kufanana processing mphamvu ndi kutayika otsika kufala, amene angathe kuthyola luso botolo la chikhalidwe mayikirowevu dongosolo ndi kupititsa patsogolo ntchito zida zankhondo zamagetsi zidziwitso monga radar, nkhondo zamagetsi, kulankhulana ndi muyeso ndi kulamulira. Komabe, makina a microwave photon ozikidwa pazida zodziwikiratu ali ndi zovuta zina monga voliyumu yayikulu, kulemera kolemera komanso kusakhazikika bwino, zomwe zimalepheretsa kwambiri kugwiritsa ntchito ukadaulo wa microwave photon pamapulatifomu apamlengalenga ndi ndege. Choncho, Integrated mayikirowevu photon luso kukhala thandizo lofunika kuswa ntchito ya mayikirowevu photon mu asilikali amphamvu zidziwitso dongosolo ndi kupereka kusewera kwathunthu ubwino wa mayikirowevu photon luso.

Pakalipano, teknoloji ya SI-based photonic integration technology ndi INP-based photonic integration technology yakhala ikukhwima pambuyo pa zaka zambiri za chitukuko cha kulankhulana kwa kuwala, ndipo zinthu zambiri zakhala zikugulitsidwa. Komabe, pakugwiritsa ntchito microwave photon, pali zovuta mumitundu iwiri iyi yaukadaulo wophatikizira mafoto: mwachitsanzo, ma electro-optical coefficient a Si modulator a Si modulator ndi InP modulator amatsutsana ndi mzere wapamwamba komanso mawonekedwe akuluakulu otsatiridwa ndi microwave. teknoloji ya photon; Mwachitsanzo, silicon optical switch yomwe imazindikira kusintha kwa njira, kaya kutengera matenthedwe-mawonekedwe amphamvu, piezoelectric effect, kapena chonyamulira chobalalitsa chonyamulira, chimakhala ndi vuto la liwiro losintha pang'onopang'ono, kugwiritsa ntchito mphamvu komanso kugwiritsa ntchito kutentha, komwe sikungakwaniritse kufulumira. kusanthula kwa beam ndi ntchito zazikulu zamtundu wa microwave photon.

Lithium niobate nthawi zonse yakhala chisankho choyamba pa liwiro lalikuluelectro-optic modulationzipangizo chifukwa cha bwino liniya electro-optic zotsatira. Komabe, chikhalidwe lithiamu niobateelectro-optical moduleamapangidwa ndi zinthu zazikulu za lithiamu niobate crystal, ndipo kukula kwa chipangizocho ndi chachikulu kwambiri, chomwe sichingakwaniritse zosowa zaukadaulo wa microwave photon. Momwe mungaphatikizire zida za lithiamu niobate ndi liniya electro-optical coefficient mu integrated microwave photon technology system yakhala cholinga cha ofufuza ofunikira. Mu 2018, gulu lofufuza kuchokera ku yunivesite ya Harvard ku United States linanena koyamba zaukadaulo wophatikizira wa Photonic kutengera filimu yopyapyala ya lithiamu niobate ku Nature, chifukwa ukadaulo uli ndi ubwino wa kuphatikiza kwakukulu, bandwidth yayikulu ya electro-optical modulation, ndi mzere wapamwamba wa electro. -Optical effect, ikangokhazikitsidwa, nthawi yomweyo idayambitsa chidwi chamaphunziro ndi mafakitale pankhani ya kuphatikiza ma photonic ndi ma microwave photonics. Malinga ndi kagwiritsidwe ntchito ka microwave photon, pepalali likuwunikiranso mphamvu ndi kufunikira kwaukadaulo wophatikiza ma photon kutengera filimu yopyapyala ya lithiamu niobate pakupanga ukadaulo wa microwave photon.

Kanema woonda wa lithiamu niobate zakuthupi ndi filimu yoondalithiamu niobate modulator
M'zaka ziwiri zaposachedwa, mtundu watsopano wa zinthu za lithiamu niobate watulukira, ndiko kuti, filimu ya lifiyamu niobate imachotsedwa ku kristalo waukulu wa lithiamu niobate ndi njira ya "ion slicing" ndipo imamangiriridwa ku Si yopyapyala ndi silika wosanjikiza. kupanga LNOI (LiNbO3-On-Insulator) zakuthupi [5], zomwe zimatchedwa woonda filimu lithiamu niobate zakuthupi mu pepala ili. Mafunde a Ridge okhala ndi kutalika kwa ma nanometer opitilira 100 amatha kuzikika pa filimu yopyapyala ya lithiamu niobate pogwiritsa ntchito njira yowuma yowuma, ndipo kusiyana kothandiza kwa ma waveguide opangidwa kumatha kufika kupitilira 0,8 (kutalika kwambiri kuposa kusiyana kwamtundu wachikhalidwe lithiamu niobate waveguides ya 0.02), monga momwe tawonetsera pa Chithunzi 1. Mafunde oletsa kwambiri oletsa mafunde amapangitsa kuti zikhale zosavuta kufanana ndi kuwala kwa kuwala ndi malo a microwave popanga modulator. Chifukwa chake, ndizopindulitsa kukwaniritsa mphamvu yotsika ya theka-wave ndi bandwidth yokulirapo muutali wamfupi.

Maonekedwe otsika otsika a lithiamu niobate submicron waveguide amaphwanya nkhokwe yamagetsi oyendetsa kwambiri achikhalidwe cha lithiamu niobate electro-optic modulator. Kutalika kwa electrode kumatha kuchepetsedwa kukhala ~ 5 μm, ndipo kuphatikizika pakati pa gawo lamagetsi ndi gawo la optical mode kumawonjezeka kwambiri, ndipo vπ · L imachepa kuchokera ku 20 V · cm mpaka 2.8 V · cm. Choncho, pansi pa mphamvu yomweyo ya theka-wave, kutalika kwa chipangizocho kumatha kuchepetsedwa kwambiri poyerekeza ndi modulator yachikhalidwe. Nthawi yomweyo, mutatha kukhathamiritsa magawo a m'lifupi, makulidwe ndi nthawi ya ma elekitirodi oyendayenda, monga momwe tawonetsera pachithunzichi, modulitsayo imatha kukhala ndi mphamvu ya ultra-high modulation bandwidth yoposa 100 GHz.

Fig.1 (a) yowerengera njira yogawa ndi (b) chithunzi chamtanda wa LN waveguide

Fig.2 (a) Waveguide ndi electrode kapangidwe ndi (b) coreplate ya LN modulator

 

Kuyerekeza kwa mafilimu oonda a lithiamu niobate modulators ndi ma modulators achikhalidwe a lithiamu niobate, ma modulator opangidwa ndi silicon ndi indium phosphide (InP) modulators ndi ma modulators ena othamanga kwambiri a electro-optical modulators, magawo akulu akufananizawo ndi awa:
(1) Theka la mafunde a volt-utali (vπ ·L, V·cm), kuyeza kusinthasintha kwa modulator, kuchepa kwa mtengo, kumapangitsanso kusinthasintha;
(2) 3 dB modulation bandwidth (GHz), yomwe imayesa kuyankha kwa modulator kusinthasintha kwapamwamba;
(3) Kutayika kwa kuwala koyika (dB) m'chigawo chosinthira. Zitha kuwoneka kuchokera patebulo kuti filimu yopyapyala ya lithiamu niobate modulator ili ndi ubwino wodziwikiratu mu kusinthasintha kwa bandwidth, theka-wave voteji, kutayika kwa kuwala kwa kuwala ndi zina zotero.

Silicon, monga mwala wapangodya wa optoelectronics ophatikizidwa, yapangidwa mpaka pano, ndondomekoyi ndi yokhwima, miniaturization yake imathandizira kugwirizanitsa kwakukulu kwa zipangizo zogwira ntchito / zopanda pake, ndipo modulator yake yakhala ikuphunziridwa mozama komanso mozama m'munda wa optical. kulankhulana. Njira yosinthira ma electro-optical modulation ya silicon imakhala makamaka chonyamulira-tion, jekeseni wonyamulira ndi kudzikundikira chonyamulira. Pakati pawo, bandwidth ya modulator ndi yabwino kwambiri ndi njira yochepetsera digiri yonyamulira, koma chifukwa kugawa kwa magawo owoneka bwino kumadutsana ndi kusagwirizana kwa dera lakutha, izi zitha kuyambitsa kupotoza kwadongosolo lachiwiri komanso kusokoneza kwachitatu. mawu, ophatikizidwa ndi kuyamwa kwa chonyamulira pa kuwala, zomwe zingapangitse kuchepetsedwa kwa matalikidwe owoneka bwino komanso kupotoza kwa ma sign.

The InP modulator ili ndi zotsatira zabwino kwambiri za electro-optical, ndipo mawonekedwe opangira ma multi-layer quantum amatha kuzindikira ultra-high komanso low drive voltage modulators ndi Vπ · L mpaka 0.156V · mm. Komabe, kusiyanasiyana kwa refractive index ndi gawo lamagetsi kumaphatikizapo mawu ozungulira komanso osagwirizana, ndipo kuwonjezereka kwamphamvu yamagetsi kumapangitsa kuti gawo lachiwiri likhale lodziwika bwino. Chifukwa chake, ma silicon ndi InP electro-optic modulators ayenera kugwiritsa ntchito kukondera kuti apange pn junction akamagwira ntchito, ndipo pn junction idzabweretsa kuyamwa kwakuya. Komabe, kukula kwa ma module awiriwa ndi ochepa, kukula kwa InP modulator ndi 1/4 ya LN modulator. Kusinthasintha kwapamwamba kwambiri, koyenera kachulukidwe kwambiri komanso ma netiweki amfupi a digito optical transmission monga ma data center. Mphamvu ya electro-optical ya lithiamu niobate ilibe njira yoyamwitsa komanso kutayika kochepa, komwe kuli koyenera kulumikizana mtunda wautali.kulumikizana kwamasondi mphamvu zazikulu ndi mlingo waukulu. Mu pulogalamu ya microwave photon, ma electro-optical coefficients a Si ndi InP ndi osagwirizana, omwe sali oyenerera pulogalamu ya microwave photon yomwe imatsata mzere wapamwamba ndi mphamvu zazikulu. Zinthu za lithiamu niobate ndizoyenera kugwiritsa ntchito ma microwave photon chifukwa cha mzere wake wokhazikika wa electro-optic modulation coefficient.


Nthawi yotumiza: Apr-22-2024