Kwa ma optoelectronics opangidwa ndi silicon, ma silicon photodetector (Si photodetector)

Kwa ma optoelectronics opangidwa ndi silicon, ma silicon photodetectors

Zojambulajambulaamasintha zizindikiro za kuwala kukhala zizindikiro zamagetsi, ndipo pamene kuchuluka kwa deta kukupitirirabe kukwera, zida zowunikira zithunzi zothamanga kwambiri zomwe zimagwirizanitsidwa ndi nsanja za optoelectronics zochokera ku silicon zakhala zofunikira kwambiri ku malo osungira deta a m'badwo wotsatira komanso maukonde olumikizirana. Nkhaniyi ipereka chithunzithunzi cha zida zowunikira zithunzi zothamanga kwambiri, makamaka pa germanium yochokera ku silicon (Ge kapena Si photodetector)zida zowunikira zithunzi za siliconza ukadaulo wophatikizidwa wa optoelectronics.

Germanium ndi chinthu chokongola chopezera kuwala kwa infrared pa nsanja za silicon chifukwa chimagwirizana ndi njira za CMOS ndipo chimayamwa kwambiri pa mafunde a telecommunication. Kapangidwe ka Ge/Si photodetector kodziwika kwambiri ndi pin diode, momwe germanium yamkati imayikidwa pakati pa madera a P-type ndi N-type.

Kapangidwe ka chipangizo Chithunzi 1 chikuwonetsa pini yoyimirira ya Ge kapenaChowunikira zithunzikapangidwe:

Zinthu zazikulu ndi izi: gawo loyamwa la germanium lomwe limamera pa silicon substrate; Limagwiritsidwa ntchito kusonkhanitsa ma contacts a p ndi n a zonyamulira magetsi; Waveguide coupling kuti kuwala kulowe bwino.

Kukula kwa Epitaxial: Kukula kwa germanium yapamwamba kwambiri pa silicon n'kovuta chifukwa cha kusagwirizana kwa lattice ya 4.2% pakati pa zinthu ziwirizi. Njira yokulira ya magawo awiri nthawi zambiri imagwiritsidwa ntchito: kutentha kochepa (300-400°C) kukula kwa buffer layer ndi kutentha kwakukulu (kupitirira 600°C) kwa germanium. Njirayi imathandiza kuwongolera kusokonekera kwa ulusi komwe kumachitika chifukwa cha kusagwirizana kwa lattice. Kuyika kwa annealing pambuyo pa kukula pa 800-900°C kumachepetsanso kuchuluka kwa kusokonezeka kwa ulusi kufika pa 10^7 cm^-2. Makhalidwe a magwiridwe antchito: Chojambulira cha Ge/Si PIN chapamwamba kwambiri chingathe kukwaniritsa: kuyankha, > 0.8A /W pa 1550 nm; Bandwidth,>60 GHz; Mphamvu yakuda, <1 μA pa -1 V bias.

Kuphatikizana ndi nsanja za optoelectronics zochokera ku silicon

Kuphatikiza kwazida zowunikira zithunzi zothamanga kwambiriPogwiritsa ntchito nsanja za optoelectronics zochokera ku silicon, zimathandiza ma transceivers apamwamba a optical ndi ma interconnect. Njira ziwiri zazikulu zolumikizirana ndi izi: Kulumikizana kwa kutsogolo (FEOL), komwe chowunikira zithunzi ndi transistor zimapangidwa nthawi imodzi pa silicon substrate zomwe zimathandiza kukonza kutentha kwambiri, koma kutenga malo a chip. Kulumikizana kwa kumbuyo (BEOL). Zowunikira zithunzi zimapangidwa pamwamba pa chitsulo kuti zisasokonezedwe ndi CMOS, koma zimangochepetsa kutentha kwa processing.

Chithunzi 2: Kuyankha ndi kuchuluka kwa mphamvu ya chowunikira cha Ge/Si chothamanga kwambiri

Kugwiritsa ntchito malo osungira deta

Zipangizo zowunikira zithunzi zothamanga kwambiri ndi gawo lofunikira kwambiri pa mbadwo wotsatira wa kulumikizana kwa malo osungira deta. Ntchito zazikulu zikuphatikizapo: ma transceivers optical: 100G, 400G ndi mitengo yapamwamba, pogwiritsa ntchito PAM-4 modulation; Achowunikira zithunzi cha bandwidth yayikulu(>50 GHz) ikufunika.

Dongosolo lolumikizidwa la optoelectronic lochokera ku silicon: kuphatikiza kwa chowunikira ndi modulator ndi zida zina; Injini yowunikira yaying'ono komanso yogwira ntchito bwino.

Kapangidwe kogawidwa: kulumikizana kwa kuwala pakati pa makompyuta ogawidwa, malo osungira, ndi malo osungira; Kulimbikitsa kufunikira kwa zida zowunikira zithunzi zomwe zimagwiritsa ntchito mphamvu zambiri komanso zosagwiritsa ntchito mphamvu zambiri.

Chiyembekezo chamtsogolo

Tsogolo la zida zowunikira zithunzi zothamanga kwambiri za optoelectronic zidzawonetsa izi:

Kuchuluka kwa deta: Kuyendetsa chitukuko cha ma transceivers a 800G ndi 1.6T; Ma Photodetector okhala ndi bandwidth yoposa 100 GHz amafunika.

Kuphatikiza bwino: Kuphatikiza kwa chip imodzi ya zinthu za III-V ndi silicon; Ukadaulo wapamwamba wophatikiza wa 3D.

Zipangizo zatsopano: Kufufuza zinthu zamitundu iwiri (monga graphene) kuti zizindikire kuwala kofulumira kwambiri; Chosakaniza chatsopano cha Gulu IV chothandizira kuphimba kutalika kwa mafunde.

Mapulogalamu atsopano: LiDAR ndi mapulogalamu ena ozindikira akuyendetsa chitukuko cha APD; Mapulogalamu a microwave photon omwe amafuna ma photodetectors apamwamba kwambiri.

Zipangizo zowunikira zithunzi zothamanga kwambiri, makamaka zowunikira zithunzi za Ge kapena Si, zakhala zoyendetsa kwambiri ma optoelectronics opangidwa ndi silicon ndi kulumikizana kwa kuwala kwa m'badwo wotsatira. Kupita patsogolo kwa zipangizo, kapangidwe ka zipangizo, ndi ukadaulo wogwirizanitsa ndikofunikira kuti tikwaniritse zosowa za bandwidth zomwe zikukula m'malo osungira deta komanso maukonde olumikizirana mtsogolo. Pamene gawoli likupitilizabe kusintha, titha kuyembekezera kuwona zowunikira zithunzi zokhala ndi bandwidth yayikulu, phokoso lochepa, komanso kuphatikizana bwino ndi ma electronic ndi ma photonic circuits.