Kwa silicon-based optoelectronics, silicon photodetectors (Si photodetector)

Kwa silicon-based optoelectronics, silicon photodetectors

Zojambulajambulaatembenuzire zizindikiro zowunikira kukhala zizindikiro zamagetsi, ndipo pamene mitengo yotumizira deta ikupitirirabe bwino, ma photodetectors othamanga kwambiri ophatikizidwa ndi silicon-based optoelectronics platforms akhala ofunika kwambiri ku malo a deta a m'badwo wotsatira ndi ma telecommunication networks. Nkhaniyi ipereka chithunzithunzi chazithunzithunzi zapamwamba zothamanga kwambiri, ndikugogomezera pa silicon based germanium (Ge kapena Si photodetector)silicon photodetectorskwa Integrated optoelectronics teknoloji.

Germanium ndi chinthu chowoneka bwino chowunikira pafupi ndi infrared kuwala pamapulatifomu a silicon chifukwa imagwirizana ndi njira za CMOS ndipo imayamwa mwamphamvu kwambiri pamafunde a telecommunication. Chodziwika kwambiri cha Ge/Si photodetector ndi pini diode, momwe intrinsic germanium imayikidwa pakati pa zigawo za P-type ndi N-type.

Kapangidwe kachipangizo Chithunzi 1 chikuwonetsa pini yowongoka ya Ge kapenaNdi Photodetectorkapangidwe:

Zinthu zazikuluzikulu zikuphatikizapo: germanium absorbing layer yokulira pa silicon gawo lapansi; Amagwiritsidwa ntchito kusonkhanitsa p ndi n kukhudzana kwa onyamula; Kulumikizana kwa Waveguide pakuyamwa bwino kwa kuwala.

Kukula kwa Epitaxial: Kukula kwa germanium wapamwamba kwambiri pa silicon ndikovuta chifukwa cha kusagwirizana kwa 4.2% pakati pa zida ziwirizi. Kukula kwa magawo awiri nthawi zambiri kumagwiritsidwa ntchito: kutentha kochepa (300-400 ° C) kukula kwa buffer ndi kutentha kwakukulu (kupitirira 600 ° C) kuyika kwa germanium. Njira iyi imathandizira kuwongolera kusuntha kwa ulusi komwe kumachitika chifukwa cha kusagwirizana kwa lattice. Kukula pambuyo pa 800-900 ° C kumachepetsanso kachulukidwe ka ulusi mpaka pafupifupi 10^7 cm^-2. Makhalidwe a machitidwe: Ge / Si PIN photodetector yapamwamba kwambiri imatha kukwaniritsa: kuyankha,> 0.8A / W pa 1550 nm; Bandwidth,> 60 GHz; Mdima wakuda, <1 μA pa -1 V kukondera.

Kuphatikiza ndi nsanja za silicon-based optoelectronics

Kuphatikiza kwama photodetectors othamanga kwambiriyokhala ndi nsanja za silicon-based optoelectronics imathandizira ma transceivers owoneka bwino komanso olumikizirana. Njira ziwiri zazikuluzikulu zophatikizira ndi izi: Kusakanikirana kwapatsogolo (FEOL), kumene photodetector ndi transistor amapangidwa panthawi imodzi pa gawo la silicon kuti azitha kutentha kwambiri, koma kutenga malo a chip. Kuphatikizana komaliza (BEOL). Photodetectors amapangidwa pamwamba pa zitsulo kuti asasokonezedwe ndi CMOS, koma amangochepetsa kutentha kwa kutentha.

Chithunzi 2: Kuyankha ndi bandwidth ya Ge/Si photodetector yothamanga kwambiri

Ntchito ya Data Center

Ma photodetectors othamanga kwambiri ndi gawo lofunika kwambiri mumbadwo wotsatira wa data center interconnection. Ntchito zazikuluzikulu zikuphatikizapo: transceivers optical : 100G, 400G ndi mitengo yapamwamba, pogwiritsa ntchito PAM-4 modulation; Ahigh bandwidth photodetector(> 50 GHz) ndiyofunikira.

Silicon-based optoelectronic Integrated circuit: monolithic kuphatikiza kwa detector ndi modulator ndi zigawo zina; Injini yowoneka bwino, yogwira ntchito kwambiri.

Zomangamanga zogawidwa: kulumikizana kwa kuwala pakati pa makompyuta ogawidwa, kusungirako, ndi kusungirako; Kuyendetsa kufunikira kwa ma photodetectors osagwiritsa ntchito mphamvu, apamwamba-bandwidth.

Malingaliro amtsogolo

Tsogolo la ma photodetectors ophatikizika a optoelectronic othamanga kwambiri liwonetsa izi:

Ma data apamwamba kwambiri: Kuyendetsa chitukuko cha 800G ndi 1.6T transceivers; Ma Photodetectors okhala ndi ma bandwidths opitilira 100 GHz amafunikira.

Kuphatikizana kwabwino: Kuphatikizika kwa chip kumodzi kwa zinthu za III-V ndi silicon; Ukadaulo wapamwamba wophatikiza wa 3D.

Zida Zatsopano: Kufufuza zinthu ziwiri-dimensional (monga graphene) kuti muzindikire kuwala kofulumira; Gulu latsopano la aloyi la Gulu IV la kufalikira kwa kutalika kwa mafunde.

Mapulogalamu omwe akubwera: LiDAR ndi ntchito zina zomveka zikuyendetsa chitukuko cha APD; Mapulogalamu a microwave photon omwe amafunikira ma photodetectors apamwamba kwambiri.

Ma photodetectors othamanga kwambiri, makamaka Ge kapena Si photodetectors, akhala dalaivala wamkulu wa silicon-based optoelectronics ndi mauthenga amtundu wotsatira. Kupita patsogolo kwazinthu, kapangidwe ka zida, ndi matekinoloje ophatikizika ndikofunikira kuti zikwaniritse zomwe zikukulirakulira za bandwidth malo amtsogolo a data ndi maukonde olumikizirana matelefoni. Pamene mundawo ukupitilizabe kusinthika, titha kuyembekezera kuwona ma photodetectors okhala ndi bandwidth apamwamba, phokoso lotsika, komanso kuphatikiza kosagwirizana ndi ma circuit electronic and photonic.